1984Electrotech establishes Special Research Systems (SRS) in Bristol, UK.
1989SRS changes its name to Surface Technology Systems (STS) and relocates to South Wales, UK. Development begins on the IX200, an integrated R&D semiconductor manufacturing platform.
1992IX200 is launched. STS signs an exclusive distribution agreement with Sumitomo Precision Products (SPP) in Japan.
1993STS and Robert Bosch (Germany) begin joint development of the Bosch Si DRIE process. SPP becomes the official distributor of STS products in Japan.
1994Bosch switching process is patented. (USA: 5501893, DEC: 4241045, JPB: 4090492)
1995SPP acquires STS from Electrotech. The world’s first Bosch-process compatible Si DRIE tools are shipped to Japan, the U.S., and Europe.
2001Domestic production begins for the MUC-21, SPP’s own Si DRIE system.
2003SPP begins domestic sales of sacrificial layer etch systems from Primaxx and XACTIX (U.S.).
2007SPP acquires Primaxx (sacrificial oxide etch systems). STS becomes a wholly owned subsidiary of SPP again.
2009SPP acquired AVIZA Technology (AVIZA) product lines and established SPP Process Technology Systems (SPTS) in the UK. Integrated technologies from AVIZA and STS, and released the Pegasus300 Si DRIE system.
2011SPTS acquired Tegal’s Si DRIE business. Completed management buyout and became SPTS Technologies (SPTS). In Japan, SPP and SPTS established a joint venture, SPP Technologies (SPT).
2015SPTS transfers its Thermal Products business (U.S.) to SPT, which begins operating it under SPT Microtechnologies USA. SPT’s overall technology portfolio expands significantly.
2024SPT ended capital ties with SPTS and became a wholly owned subsidiary of SPP.
Vertical Furnaces
1962THERMCO Systems is founded in the United States.
1988THERMCO Systems is acquired by Silicon Valley Group (SVG).
2001SVG and THERMCO Systems are acquired by ASML.
2003AVIZA Technology (AVIZA) acquires the thermal product line.
2009Sumitomo Precision Products (SPP) acquires the thermal division of AVIZA.
2011Management buyout of the thermal business is backed by Bridgepoint.
2014SPTS (including thermal division) is acquired by Orbotech.
2015Thermal Products business is acquired by SPP, and operated under SPT Microtechnologies USA.
