Products
Reliable etch solutions for MEMS, power, and specialty semiconductor manufacturing — trusted worldwide.
High-quality PECVD for low-temperature deposition with excellent thickness control — ideal for advanced semiconductor and specialty device manufacturing.
Vertical Batch Furnace
Learn More About Vertical Batch Furnace SolutionsSPT's vertical batch furnaces for thermal wafer processing are customized to meet your application, configuration, and substrate needs.
AVP Ace
Newest release Advanced/Rapid Vertical Processor for 150mm and 200mm wafers
RVP Ace
Newest release Rapid Vertical Processor for 200mm and 300mm wafers
AVP/RVP
AVP-8000, AVP-8200, RVP-9000, and RVP-9200 Vertical Processors for 150-200mm wafers
RVP-300/RVP-550
RVP-300plus and RVP-550 Rapid Vertical Processors for 200mm and 300mm wafers
APCVD
Upgrades and spares for legacy Watkins Johnson (WJ) Atmospheric Pressure CVDs.