APCVD
Our legacy wafer transport system via a self-cleaning belt conveyor for excellent system reliability and lowest cost of ownership for dielectric gap-fill.
Atmosphere Pressure Chemical Vapor Deposition
APCVD
Watkins Johnson (WJ) Atmospheric Pressure CVDs with self-cleaning, heated conveyor processing
Feature
Why SPT’s APCVD Systems Continue to Be Trusted
Built on decades of Watkins Johnson innovation, our APCVD tools deliver proven reliability, uniform deposition, and long-term support — all optimized for dielectric gap-fill.
Reliable Self-Cleaning Belt Conveyor System
Legacy transport technology ensures stable operation and reduced downtime.
Ideal for high-throughput dielectric gap-fill with low cost of ownership.
Patented Linear Injector for Film Uniformity
WJ’s unique linear injector enables precise, repeatable APCVD deposition.
Achieves excellent within-wafer uniformity with no transient properties.
Continued Support and Upgrade Options
SPT provides ongoing service, spares, and performance upgrades. Extend the life of WJ-APCVD systems with modernized components.
Spares and Upgrades
Extend the Life of Your Legacy Tools
Factory-certified spares and upgrades are available for the following platforms:
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WJ-999
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WJ-1000
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WJ-1500
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Chambers
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3
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4
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4
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Process
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TEOS, Hydride
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TEOS, Hydride
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TEOS
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