SPT

Explore Precise and Adaptable Technology

Explore Precise and Adaptable Technology

Explore Plasma Solutions
Innovate your process. Download our Process Notes.

Innovate your process. Download our Process Notes.

Download Process Notes
Solutions for MEMS, Power, SEMI, RF, and LED

Solutions for MEMS, Power, SEMI, RF, and LED

Plasma Technology to Drive Innovation
Explore Precise and Adaptable Technology
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Solutions for MEMS, Power, SEMI, RF, and LED

SPT’s Proven Track Record Trusted Worldwide

Decades of experience. Thousands of systems delivered. Trusted by manufacturers worldwide for precision, reliability, and innovation.

SPT Plasma Systems

Over0years of technical development

0+ units installed worldwide

SPT Vertical Furnaces

Over0years of technical development

0+ units installed worldwide

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Solutions

Explore how our technologies support MEMS, power devices, and more — from R&D to mass production.

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Products

Explore our range of plasma processing systems and vertical batch furnaces — designed for precision, reliability, and scalable manufacturing across industries.

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Support

Comprehensive support to keep your systems running at peak performance — from installation to maintenance and upgrades.

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Sustainability

Sustainability is embedded in how SPT operates, innovates, and governs.

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